第68回 応用物理学会 春季学術講演会

@misc{nokey,

title = {熱ナノインプリントによるナノパターンを有するポリマー基板上へのリン酸Ca系薄膜の堆積},

author = {金子奈帆 and 大賀友瑛 and 大島淳史 and 金子智 and 松田晃史 and 吉本護},

year  = {2021},

date = {2021-03-19},

urldate = {2021-03-19},

keywords = {},

pubstate = {published},

tppubtype = {presentation}

}

@misc{nokey,

title = {環状オレフィンポリマー基板への種々の表面修飾が及ぼすZnO薄膜の配向結晶成長への影響},

author = {大賀友瑛 and 金子奈帆 and 金子智 and 松田晃史 and 吉本護},

year  = {2021},

date = {2021-03-19},

urldate = {2021-03-19},

keywords = {},

pubstate = {published},

tppubtype = {presentation}

}

@misc{nokey,

title = {EUV光源コレクターミラー保護膜における表面劣化の抑制},

author = {本田能之 and 永井伸治 and 森田昌幸 and 安藤正彦 and 松田晃史 and 吉本護},

year  = {2021},

date = {2021-03-18},

urldate = {2021-03-18},

keywords = {},

pubstate = {published},

tppubtype = {presentation}

}

@misc{nokey,

title = {紫外レーザーアニーリングによる種々の不純物をドープしたβ-Ga_{2}O_{3}薄膜の固相結晶化と特性評価},

author = {渡邉一樹 and 松島拓海 and 大賀友瑛 and 土嶺信男 and 金子智 and 松田晃史 and 吉本護},

year  = {2021},

date = {2021-03-17},

urldate = {2021-03-17},

keywords = {},

pubstate = {published},

tppubtype = {presentation}

}

@misc{nokey,

title = {真空紫外光(172 nm)照射によるPLD合成NiO薄膜の導電性への影響},

author = {金子健太 and 篠崎佳晴 and 金子智 and 松田晃史 and 吉本護},

year  = {2021},

date = {2021-03-16},

urldate = {2021-03-16},

keywords = {},

pubstate = {published},

tppubtype = {presentation}

}